HITACHI S-9220 扫描电子显微镜
Configurations:
Magnification: 1000 to 300000x
Measurement range: 0.1-2um
Measurement repeatability: 3nm
Resolution: 3nm
Throughput (20 points continuous): 11 wafers/hour
Stage stop accuracy: ±5.0 um
Resolution: Secondary electron image 3nm
Reproducible precision of measurement: 3δ ≦ 0.005μm
Reproducible precision of the position: Within in ± 5 μm
Prealignment precision of the loader: Within ± 10 μm
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