Tel ACT-8 涂布机
The CLEAN TRACK ACT 12 and ACT 8 are coater/developers that support 300-mm/200-mm wafer processing. They enable stable, high-level processing and smooth development from R&D through to mass production. During in-line processing, the footprint can be reduced to a size equivalent to existing systems, while high-speed transport accomplishes a high throughput. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, a chemical filter and a high-accuracy oven are used to support DUV processing.
Features
Supports 120 WPH ( wafer per hour ) throughput
Supports 300-mm (200-mm) factory automation
In-line metrology options
Performs recipe management, reliability monitoring, and data analysis (options) remotely from a group controller.
Applications
Dry lithography process (ArF, KrF, i-line)
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