- Accretech/TSK APM 90A 晶圆检测仪
- 发布时间：2017/6/30 17:24:27 修改时间：2017/6/30 17:24:27 浏览次数：880
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Accretech/TSK APM 90A 晶圆检测仪
DEscriptION:
Automatic Wafer Prober
Standard Configuration:
1. Single Cassette
2. Hot Chuck
3. GPIB Interface
4. Clean pad stage with clean pad
5. Nickel chuck for ambient~hot temperature
We can also add or replace below options at additional cost:
1. CN1 & CN2 external cable
2. APM90A OCR
3. Square probe card holder
4. INKER
5. Golden Chuck
6. HingeAccuracy within 5 Microns / 0.2 mil (± 2.5 microns) Wafer Size 4,5, 6, and 8 inch Maximum X/Y Speed 200 mm (8″) / sec. Z Stage/Chuck Range 1.36″ Speed 35 ms/0.020″ stroke Rotation ± 5o Loader (wafer handler) Cassette Capacity 1 standard; 2nd cassette optional Wafer handling robotic arm Fine Alignment CCD image processing Hard Disk Drive 100 Mb Floppy Disk Drive 3.5″; 1 standard Display 10.4″ Color LCD Power Consumption Approx 1.5 KVA Facilities Required Air 60 PSI @ 3 cfm. Vacuum 25 in/hg. Dimensions 44″w x 44″ D x 35.2″ H Weight 1,650 lbs.
