LAM 2300 多晶硅蚀刻机
Currently Configured for 300mm wafer sizes ? MFG Date: 2005 ? Install Type: Thru-the-wall (TTW) ? CE Marked ? Protocol: FEOL ? System SW: 1.7.1-SP3-HF5 ? Mainframe Type: V2.0 o Cassette Interface: ? (3) Brooks 300mm FOUP Load-ports o Brooks Mag 7 Robot o User Interface: Side/Front o OES: Ocean Optics o Status Lamp (RYGB) Side/Front ? PM3: 2300 Kiyo45 Poly Etch o SN: 23KY45-009 o MFG: 2006 o TMP Pump: Edwards STP-XA2703CV o RF PS (Top): AE Apex 1513, 13.56MHz (1500W max) o RF PS (Btm): AE Apex 1513, 13.56MHz (1500W max) o Gas Box: ? Unit 8561 MFCs ? SICL4, CL2, SF6, CHF3, H2, NF3, HBR, HBR, CH2F2, CF4, O2, O2, N2, CHF3, Ar, He ? PM4: 2300 Mwave Strip o SN: 23MWS218 o MFG: 2005 o Mwave PS: Astex AX2630LRC3-S o Mwave Match: MKS V0DMB-26565 o Gas Box: ? Unit 1661 MFCs ? N2 (1000), O2 (5000), CF4 (100), H2O (3000) ? Heat Exchanger/Chiller(s): o (2) Noah Precision 3500 POU o (2) Noah Precision PSC-8800 Controllers ? Pump(s): o Note: Not all Pumps may be present – Please inspect to confirm ? AC Power Dist. Box (Wall/Unistrut mount) ? Power Requirements: 208V, 272A, 3-PH, 3-wire+Gnd, 50/60Hz
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