HITACHI S-9220 扫描电子显微镜

HITACHI S-9220 扫描电子显微镜

Configurations:

Magnification:      1000 to 300000x

Measurement range: 0.1-2um

Measurement repeatability: 3nm

Resolution: 3nm

Throughput (20 points continuous): 11 wafers/hour

Stage stop accuracy:     ±5.0 um

Resolution:    Secondary electron  image 3nm

Reproducible precision  of measurement:       3δ ≦ 0.005μm

Reproducible precision of the position:     Within in  ± 5 μm

Prealignment precision of the loader: Within  ± 10 μm